| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an SPL device of higher transfer position accuracy. <P>SOLUTION: A patterning device which draws a pattern using a plurality of probes is mounted with a plurality of multi-probe heads. The multi-probe is collectively replaced if a probe degrades, and characteristics of each probe are correctively measured on the device. The attitude of a probe head is kept constant at alignment measurement and drawing. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
