| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To produce a polymer-coated particles useful for carrying out chemical mechanical polishing of magnetic, optical, semiconductor or silicon substrates. <P>SOLUTION: At first, a dispersion of particle cores in a non-aqueous solvent is prepared. Then, a polymeric precursor is introduced into the dispersion and the polymeric precursor is reacted with the dispersion to form a polymer. At least a portion of the surface of the particle cores is coated with the polymer to form the polymer-coated particles having a solid outer polymeric shell. A non-aqueous solvent is substituted with water to form an aqueous mixture containing the polymer-coated particles. Then, an aqueous chemical mechanical polishing formulation is formed by using the polymer-coated particles without drying the polymer-coated particles. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
