| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a treatment method for a harmful component-containing gas exhibiting good treatment efficiency to the harmful component-containing gas with difficult plasma decomposition such as perfluoromethane, and a treatment apparatus. <P>SOLUTION: In the treatment method for the harmful component-containing gas, the harmful component-containing gas is decomposed by plasma 100 in co-existence of a reactive gas. In the treatment method for the harmful component-containing gas, electric power of a microwave for generating the plasma 100 is adjusted by existence of perfluoromethane in the harmful component-containing gas. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
