| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating unit where the bulb of a heater lamp never becomes black and impurity from the bulb is never released into a chamber for heating a matter to be treated even when input power to the heater lamp is increased to be high output. SOLUTION: The heating unit provided with the heater lamp 1 has an outer tube 2 incorporating the heater lamp 1 and having sealing parts 12 at both of its ends, and cooling gas is made to flow within the outer tube 2. Then, a cooling gas flow-in tube 22 and a cooling gas flow-out tube 23 are provided at the outer tube 2. The outer tube 2 is supported on a substrate 3 with the cooling gas flow-in tube 22 and the cooling gas flow-out tube 23. Moreover, the heater lamp 1 comprises a filament 11 inside. An outer lead bar 13 projects from the sealing part 12 of the heater lamp 1, and a power feeding member 6 is connected and extended through the cooling gas flow-in tube 22 and the cooling gas flow-out tube 23. COPYRIGHT: (C)2006,JPO&NCIPI
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