METHOD FOR FORMING THIN FILM OF AMORPHOUS TITANIUM OXIDE, AND PHOTOCATALYTIC COMPOSITE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a thin film of amorphous titanium oxide having excellent photocatalytic performance. SOLUTION: The method for forming the thin film of amorphous titanium oxide having the photocatalytic performance includes forming the titanium oxide film on a substrate, while irradiating the substrate or a vapor flow of evaporated titanium oxide, with an ion beam. COPYRIGHT: (C)2006,JPO&NCIPI