发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor crystal, by which the semiconductor crystal can be efficiently manufactured. SOLUTION: In the method for manufacturing the semiconductor crystal by placing a seed crystal on the surface of one end of a pedestal disposed in the inside of a crucible made of a material having a melting point higher than 2,000°C and growing the semiconductor crystal on the surface of the seed crystal, the semiconductor crystal is grown under conditions that a gap is formed between the side wall of the pedestal and the inner wall of the crucible, and the temperature of the end surface of the pedestal on which the seed crystal is placed, is made higher than that of the end part of the pedestal on which the seed crystal is not placed. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006103997(A) 申请公布日期 2006.04.20
申请号 JP20040290515 申请日期 2004.10.01
申请人 SUMITOMO ELECTRIC IND LTD 发明人 FUJIWARA SHINSUKE;MIYANAGA TOMOMASA
分类号 C30B23/00;C30B29/38 主分类号 C30B23/00
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