发明名称 Integrated circuit device having non-linear active area pillars
摘要 An integrated circuit device having non-linear active area pillars. More specifically, pillars are formed in a substrate such that sidewalls are exposed. The sidewalls of the pillars and the top surface of the pillars are covered with a gate oxide and a conductive layer to form a channel through the pillars. The pillars are patterned to form non-linear active area lines having angled segments. The conductive layer is patterned to form word lines that intersect the active area lines at the angled segments.
申请公布号 US2006081921(A1) 申请公布日期 2006.04.20
申请号 US20050287038 申请日期 2005.11.23
申请人 发明人 WANG HONGMEI;MOULI CHANDRA;TRAN LUAN
分类号 H01L29/94 主分类号 H01L29/94
代理机构 代理人
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