发明名称 ELECTRIC FIELD ELECTRON EMITTING DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an electric field electron emitting device that exhibits a high dielectric voltage between a cathode and an anode, high electron emission efficiency and high light emission uniformity, and to provide a manufacturing method thereof. <P>SOLUTION: The electric field electron emitting device 1 comprises: a cathode electrode 11b; an insulating film 2 formed on the cathode electrode 11b and having a hole 6a; a gate electrode 3a formed on the insulating film 2 and having a hole 6b that communicates with the hole 6a; a carbon nanotube 7 formed at the bottom of the hole 6 and electrically connected to the cathode electrode 11b; and an insulating film 8 formed along the inner wall of the hole 6b. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006107932(A) 申请公布日期 2006.04.20
申请号 JP20040293251 申请日期 2004.10.06
申请人 MITSUBISHI ELECTRIC CORP 发明人 TARUYA MASAYOSHI;YAMAMUKAI MIKIO;TOMOHISA SHINGO;KOBAYASHI HIROSHI
分类号 H01J1/304;H01J9/02 主分类号 H01J1/304
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