| 摘要 |
PROBLEM TO BE SOLVED: To easily grasp a state of a device placed in a vacuum by using a length-measuring SEM which is a device conveying a wafer into a sample chamber kept in a high-vacuum state to make length measurement of a line width and a hole diameter of a semiconductor device. SOLUTION: The state of the device placed in vacuum is grasped by forming a screen showing a state of a drive system in vacuum, a vacuum state of a vacuum bulb, and a sate of an electronic optical system. ON/OFF timing, Open/Close timing and vacuum states of a variety of sensors, are formed in a timing chart, so that the device makes time measurement and comparison with reference data. With this function provided, accurate judgment is made at device maintenance/inspection and in device repair. COPYRIGHT: (C)2006,JPO&NCIPI
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