发明名称 |
Microelectronic semiconductor component has at least one electrode comprising a carbon containing layer |
摘要 |
<p>A microelectronic semiconductor element comprises at least one electrode comprising a carbon-containing layer. Preferably the element is a FET having a gate electrode and a source/drain electrode comprising the carbon-containing layer. An independent claim is also included for a production process for the above.</p> |
申请公布号 |
DE102004049452(A1) |
申请公布日期 |
2006.04.20 |
申请号 |
DE20041049452 |
申请日期 |
2004.10.11 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
STEINLESBERGER, GERNOT;KREUPL, FRANZ;DUESBERG, GEORG STEFAN;HARTWICH, JESSICA;DREESKORNFELD, LARS |
分类号 |
H01L29/78;H01L21/336;H01L29/43 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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