发明名称 |
TEST DEVICE, TEST METHOD, AND ELECTRONIC DEVICE |
摘要 |
<p>A test device tests a switching speed of a circuit including a logical element at a pre-stage and a logical element at a post-stage for inputting the output signal of the pre-stage logical element. The post-stage logical element includes a post-stage FET for inputting an output signal to a gate terminal and outputting different levels of voltage when the voltage of the output signal is greater or smaller than a threshold voltage. The test device includes: a threshold voltage setting unit for setting a substrate voltage of the post-stage FET to a value different from the substrate voltage during normal operation of the circuit so as to set a threshold voltage different from that of the normal operation at the post-stage FET; a delay time measuring unit for measuring a delay time of the circuit where a threshold value different from that of the normal operation is set; a failure detection unit for detecting failure of the switching speed of the circuit according to the delay time.</p> |
申请公布号 |
WO2006041059(A1) |
申请公布日期 |
2006.04.20 |
申请号 |
WO2005JP18700 |
申请日期 |
2005.10.11 |
申请人 |
ADVANTEST CORPORATION;FURUKAWA, YASUO |
发明人 |
FURUKAWA, YASUO |
分类号 |
G01R31/28;H01L21/8238;H01L27/04 |
主分类号 |
G01R31/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|