发明名称 TEST DEVICE, TEST METHOD, AND ELECTRONIC DEVICE
摘要 <p>A test device tests a switching speed of a circuit including a logical element at a pre-stage and a logical element at a post-stage for inputting the output signal of the pre-stage logical element. The post-stage logical element includes a post-stage FET for inputting an output signal to a gate terminal and outputting different levels of voltage when the voltage of the output signal is greater or smaller than a threshold voltage. The test device includes: a threshold voltage setting unit for setting a substrate voltage of the post-stage FET to a value different from the substrate voltage during normal operation of the circuit so as to set a threshold voltage different from that of the normal operation at the post-stage FET; a delay time measuring unit for measuring a delay time of the circuit where a threshold value different from that of the normal operation is set; a failure detection unit for detecting failure of the switching speed of the circuit according to the delay time.</p>
申请公布号 WO2006041059(A1) 申请公布日期 2006.04.20
申请号 WO2005JP18700 申请日期 2005.10.11
申请人 ADVANTEST CORPORATION;FURUKAWA, YASUO 发明人 FURUKAWA, YASUO
分类号 G01R31/28;H01L21/8238;H01L27/04 主分类号 G01R31/28
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