SHIELD BODY AND VACUUM PROCESSING APPARATUS

摘要

A vacuum processing apparatus using a shield body that is used in a processing container of the vacuum processing apparatus, that has a heating means, and that has a simple structure enabling the shield body to be thinned. A vacuum processing apparatus having a processing container, a gas discharge means for discharging gas in processing space inside the processing container, a holding table for holding a substrate to be processed, and a shield body placed inside the processing container. The shield body has an outer wall structure exposed to the processing space that is located inside the processing container and is reduced in pressure, inner space formed inside the outer wall structure and isolated from the processing space, and a heating means placed in the processing space and heating the outer wall structure. The inner space is communicated with the outside of the vacuum processing container, and the heating means is constructed so as to extend into the inner space in a sheet-like form.