| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a maintenance-and-repair-timing determination method capable of exactly and easily determining the maintenance-and-repair-timing of a treatment apparatus of a harmful component-containing gas such as a perfluoro compound. <P>SOLUTION: In the maintenance-and-repair-timing determination method for the treatment apparatus of the harmful component-containing gas provided with a plasma vessel 30; and a plasma generation mechanism 20 for generating plasma 100 in the plasma vessel, effective electric power, i.e., difference of incidental electric power of a micro-wave entering from the plasma generation mechanism 20 to the plasma vessel 30 and reflection electric power of the microwave reflected from the plasma vessel 30 to the plasma generation mechanism 20 is measured. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
