| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-electromechanical system (MEMS) device in which the voltage used is compatible with the current digital electronic technology. SOLUTION: The array of a MEMS mirror has mirrors 101 to be coupled crossing two deformable spring bars 103 deformed by the use of respective drive devices 105. The spring bars are coupled parallel to each other and by a cross-bar. A support is coupled to the cross-bar at one end and to the mirror at the opposite end. At least one movable driving plate 107 is coupled crossing the deformable spring bar on the opposite side from the mirror support. With the motion of the driving plate, the spring bar rotates in a place near the connection part of the driving plate. With rotation the spring bar moves downward, and as a result, the mirror moves downward. COPYRIGHT: (C)2006,JPO&NCIPI
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