| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope in which control of a button and a slider or the like realizing demand of an operator from a complicated operation screen is shown to the operator in a visually comprehensive state, and in which the most effective operation can be instructed to the operator by analyzing an operation state at that time point in the case a problem occurs during observation. SOLUTION: In the electron microscope which uses a graphical user interface for the operation screen by a display device by mounting a computer and carries out controls of observation conditions, the computer has an operation judgement processing circuit which automatically determine states of successively changing observation conditions at every moment according to preset conditions, and an operation guide function in which a mouse cursor on the operation screen automatically moves to an operation target object and in which an appropriate operation is instructed to the operator. COPYRIGHT: (C)2006,JPO&NCIPI
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