| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection unit capable of sure and accurate measurement by means of stable electrical connections by improving the durability of a wiring connection part. SOLUTION: When moving an inspection probe 1 toward a work 16, a probe part 2 tip comes into contact with the work 16, and almost simultaneously a pin tip guide board 12 comes into contact with the work 16. Even in a state that makes sure the contact of the probe part 2 with the work 16, while a spiral spring 3 is compressed by moving a pin board 13 furthermore, the pin tip guide board 12 absorbs a relative movement with the pin board 13, while deforming a spiral spring 20, by being held in a contact state with the work 16, Hereby, a wiring support board 15, integrated with the pin tip guide board 12 via a connection member 21 is also held in a state of the probe part 2 abutting on the work 16, regardless of the movement of the pin board 13, causing no relative movement between the probe part 2 and the wiring support board 15. COPYRIGHT: (C)2006,JPO&NCIPI
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