摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor-testing device that can use a reference comparator having a simple structure and can reduce costs, and to provide a method for calibrating the semiconductor-testing device. SOLUTION: The semiconductor-testing device comprises: a reference driver DR0 for outputting a signal having a reference waveform in which the change timing of a voltage level becomes a reference; a driver DR1 for outputting a signal having a waveform in which the reference waveform is inverted; delay elements 220, 222 for changeably delaying the output timing of a signal outputted from the driver DR1 while being provided at the prestage of the driver DR1; a calibration board 50 for compositing the output signal of the reference driver DR0 and that of the driver DR1; a reference comparator CP0 for adjusting the amount of delay in the delay elements 220, 222, based on a composited waveform outputted from the calibration board 50; and a tester control section 12. COPYRIGHT: (C)2006,JPO&NCIPI
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