发明名称 SEMICONDUCTOR-TESTING DEVICE AND ITS CALIBRATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor-testing device that can use a reference comparator having a simple structure and can reduce costs, and to provide a method for calibrating the semiconductor-testing device. SOLUTION: The semiconductor-testing device comprises: a reference driver DR0 for outputting a signal having a reference waveform in which the change timing of a voltage level becomes a reference; a driver DR1 for outputting a signal having a waveform in which the reference waveform is inverted; delay elements 220, 222 for changeably delaying the output timing of a signal outputted from the driver DR1 while being provided at the prestage of the driver DR1; a calibration board 50 for compositing the output signal of the reference driver DR0 and that of the driver DR1; a reference comparator CP0 for adjusting the amount of delay in the delay elements 220, 222, based on a composited waveform outputted from the calibration board 50; and a tester control section 12. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006105636(A) 申请公布日期 2006.04.20
申请号 JP20040289477 申请日期 2004.10.01
申请人 ADVANTEST CORP 发明人 IBANE TORU
分类号 G01R31/28 主分类号 G01R31/28
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