Method for forming catalyst metal particles for production of single-walled carbon nanotube

摘要

Provided is a process for forming catalyst metal fine particles for synthesizing a single-walled carbon nanotube by a CCVD process on a substrate, wherein a solution is prepared by dispersing or dissolving a catalyst metal salt of an organic compound or an inorganic compound in a solvent; the solution is coated on the substrate and dried; then, the substrate is heated in an oxidative atmosphere to thereby remove the solvent component remaining on the substrate by oxidative decomposition, and fine particles of an oxide of the catalyst metal are formed on the substrate; and then, the oxide of the catalyst metal is reduced in an atmosphere of an inert gas or a gas having reducing action to fix the catalyst metal fine particles on the substrate.