发明名称 |
TRACING METHOD AND APPARATUS |
摘要 |
A tracing method in which tracing is performed by moving a spatial optical modulation device in a predetermined scanning direction relative to a tracing surface is provided. The spatial optical modulation device includes multitudes of tracing elements for modulating inputted light according to control signals transferred in accordance with tracing information. The method allows the spatial optical modulation device to perform the modulation rapidly to reduce the tracing time. The special modulation device is divided into a plurality of blocks A to D, and the control signals for each of the blocks A to D are transferred to the blocks in parallel. |
申请公布号 |
WO2006041201(A1) |
申请公布日期 |
2006.04.20 |
申请号 |
WO2005JP19246 |
申请日期 |
2005.10.13 |
申请人 |
FUJI PHOTO FILM CO., LTD.;OZAKI, TAKAO;OKAZAKI, YOJI |
发明人 |
OZAKI, TAKAO;OKAZAKI, YOJI |
分类号 |
G03F7/20;G03B27/32;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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