发明名称 Actuator assembly and lithographic apparatus comprising such an actuator assembly
摘要 An actuator assembly includes a coil moveably positionable in a magnetic field generated by a magnet assembly, each of the coil and the magnet having substantially only one side facing the other. A magnetized field-shaping element is provided for shaping the magnetic field such that the magnetic field is substantially perpendicular to the direction of the electrical current for generating a force in a first degree of freedom. Thus, the coil may easily be mounted, since it does not need to be enclosed by magnet poles.
申请公布号 US2006082753(A1) 申请公布日期 2006.04.20
申请号 US20040967306 申请日期 2004.10.19
申请人 ASML NETHERLANDS B.V. 发明人 COX HENRIKUS H.M.;HOL SVEN A.J.;JACOBS HERNES
分类号 G03B27/58 主分类号 G03B27/58
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