Method for manufacturing piezoelectric film, laminate structure of substrate and piezoelectric film, piezoelectric actuator and method for manufacturing same

摘要

The present invention provides a simple method using aerosol deposition, for manufacturing a piezoelectric film that will simultaneously satisfy various characteristics required of a piezoelectric film. In the method, the piezoelectric film is formed on a substrate (4) by ejecting an aerosol (3) containing particles of a piezoelectric material onto the substrate so that the particles adhere thereto, and a second piezoelectric layer is formed on the first piezoelectric layer by conducting the ejection such that energy used for crushing the particles when the particles collide with the substrate is less than in the formation of the first piezoelectric film.