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经营范围
发明名称
CANISTER FOR A SEMICONDUCTOR MANUFACTURING PROCESS
摘要
申请公布号
KR20060033233(A)
申请公布日期
2006.04.19
申请号
KR20040082224
申请日期
2004.10.14
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, SANG YONG
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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