METHOD FOR FABRICATION OF SEMICONDUCTOR DEVICE CAPABLE OF PREVENTING PATTERN COLLAPSE,申请号KR20040082751-传众专利搜索

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发明名称	METHOD FOR FABRICATION OF SEMICONDUCTOR DEVICE CAPABLE OF PREVENTING PATTERN COLLAPSE
摘要
申请公布号	KR20060033576(A)	申请公布日期	2006.04.19
申请号	KR20040082751	申请日期	2004.10.15
申请人	HYNIX SEMICONDUCTOR INC.	发明人	MA, WON KWANG
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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