SUBSTRATE GUIDE OF SEMICONDUCTOR CLEANING APPARATUS,申请号KR20040082138-传众专利搜索

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发明名称	SUBSTRATE GUIDE OF SEMICONDUCTOR CLEANING APPARATUS
摘要
申请公布号	KR20060033171(A)	申请公布日期	2006.04.19
申请号	KR20040082138	申请日期	2004.10.14
申请人	SEMES CO., LTD.	发明人	KO, SANG JIN
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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