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发明名称
摘要
申请公布号	JP3768472(B2)	申请公布日期	2006.04.19
申请号	JP20020356113	申请日期	2002.12.09
申请人		发明人
分类号	H01L21/60;B65H20/16;H01L21/50;H01L21/68	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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