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发明名称
摘要
申请公布号	JP3768082(B2)	申请公布日期	2006.04.19
申请号	JP20000255686	申请日期	2000.08.25
申请人		发明人
分类号	G01N1/32;H01L21/66;G01N1/28;H01L21/302;H01L21/306;H01L21/3065;H01L21/3205	主分类号	G01N1/32
代理机构		代理人
主权项
地址

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