发明名称 |
A method of etching porous dielectric |
摘要 |
The present invention relates to methods of etching a porous dielectric. The method includes etching the film in a plasma etch chamber with CF4, H2 and a noble gas, wherein the CF4 to H2 gas flow ratio is between 1.33:1 and 2.7:1 and the noble gas is greater than about 42% of the total gas flow to the plasma chamber. |
申请公布号 |
GB2401483(B) |
申请公布日期 |
2006.04.19 |
申请号 |
GB20040008408 |
申请日期 |
2004.04.15 |
申请人 |
TRIKON TECHNOLOGIES LIMITED |
发明人 |
JOON-CHAI YEOH;JOON-CHAI YEOH |
分类号 |
H01L21/3065;H01L21/311;H01L21/768;H01L23/522 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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