A transducer is provided herein which comprises an unbalanced proof mass ( 51 ), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass ( 51 ) has first ( 65 ) and second ( 67 ) opposing sides that are of unequal mass.
申请公布号
EP1646878(A1)
申请公布日期
2006.04.19
申请号
EP20040777789
申请日期
2004.07.06
申请人
FREESCALE SEMICONDUCTOR, INC.
发明人
MCNEIL, ANDREW, C.;LI, GARY, G.;KOURY, DANIEL, N., JR.
