发明名称 Method for removing particles from a surface
摘要 Method for cleaning a surface is disclosed comprising a cleaning step with an aqueous cleaning solution comprising nitrogen containing cations, selected from the group of ammonium ions and primary, secondary and tertiary ammonium ions, the pH-value of said solution is below 9 wherein mechanical agitation is applied to the particle for at least part of the time during the cleaning step.
申请公布号 EP1648024(A1) 申请公布日期 2006.04.19
申请号 EP20040105068 申请日期 2004.10.15
申请人 SEZ AG 发明人 PFEUFFER, ALEXANDER
分类号 H01L21/306 主分类号 H01L21/306
代理机构 代理人
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