发明名称 Linearity semi-conductive pressure sensor
摘要 A pressure sensor system involves a semi-conductive diaphragm electrode overlying a cavity in a semiconductor chip, with the center of the diaphragm secured to a mesa extending upwardly from the cavity. A second electrode is implemented by a heavily doped raised ring between the mesa and the periphery of the chip at the ring of maximum deflection of the diaphragm. The raised ring electrode is heavily doped with one polarity, with light doping near the base of the raised area, and the remainder of the cavity is heavily doped with the opposite polarity. The plot of Linearity Error versus width of the ring electrode, has a minimum, and the width of the ring electrode and related constructional features are selected to conform to the minimum point of the linearity function. The reference capacitor is arcuate in configuration and extends part way around and in immediate proximity to the sensor diaphragm.
申请公布号 US7028551(B2) 申请公布日期 2006.04.18
申请号 US20040872055 申请日期 2004.06.18
申请人 KAVLICO CORPORATION 发明人 PARK KYONG M.;SPIVAK ALEXANDER F.
分类号 G01L9/08;G01L9/00;G01L9/12 主分类号 G01L9/08
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