METHOD FOR FIXING METAL PARTICLE, AND METHOD FOR PRODUCING METAL PARTICLE-CONTAINING SUBSTRATE, METHOD FOR PRODUCING CARBON NANOTUBE-CONTAINING SUBSTRATE AND METHOD FOR PRODUCING SEMICONDUCTOR CRYSTALLINE ROD-CONTAINING SUBSTRATE RESPECTIVELY USING SUCH FIXING METHOD

摘要

Disclosed is a method for adhering a metal particle to a certain position on a substrate. A resist film in which a metal compound is dispersed is formed on a substrate (101). Patterning of the resist film is performed through lithography. The substrate (101) on which a resist pattern is formed is heated in an oxygen atmosphere, so that a metal particle (106) is adhered to the surface of the substrate (101) while removing the resin in the resist pattern.