Movable MEMS-based noncontacting device

摘要

A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.