发明名称 |
Conflict resolution among multiple controllers |
摘要 |
A method and an apparatus are provided for conflict resolution among a plurality of controllers. The method includes receiving a first control instruction from a first process controller to process a workpiece, receiving a second control instruction from a second process controller to process the workpiece and adjusting at least one of the first control instruction and the second control instruction to process the workpiece to achieve a desired process goal.
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申请公布号 |
US7031793(B1) |
申请公布日期 |
2006.04.18 |
申请号 |
US20020286305 |
申请日期 |
2002.11.01 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
JENKINS NAOMI M.;WANG JIN;MARKLE RICHARD J.;COSS, JR. ELFIDO;CUSSON BRIAN K. |
分类号 |
G06F19/00;G05B11/01;G05B15/02;G05B19/18 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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