发明名称 |
Method and apparatus for testing TFT array |
摘要 |
A testing method for a TFT array substrate using a self-emitting element drive where pixels are arranged in a matrix and each pixel comprises a drive transistor having a gate formed from a first structural material and a source and a drain formed from a second structural material, and a hold capacitor having a first electrode formed from the first structural material and a second electrode formed from the second structural material, where the testing method comprises a first step for applying a first voltage to the hold capacitor; a second step for applying a second voltage to the hold capacitor after the first step; a third step for measuring the charge in the pixel after applying the second voltage; and a fourth step for calculating the capacitance of the hold capacitor from the charge and the potential difference between the first voltage and the second voltage.
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申请公布号 |
US7029934(B2) |
申请公布日期 |
2006.04.18 |
申请号 |
US20050176707 |
申请日期 |
2005.07.07 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
CHIKAMATSU KIYOSHI;TAJIMA KAYOKO |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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