发明名称 Method and apparatus for testing TFT array
摘要 A testing method for a TFT array substrate using a self-emitting element drive where pixels are arranged in a matrix and each pixel comprises a drive transistor having a gate formed from a first structural material and a source and a drain formed from a second structural material, and a hold capacitor having a first electrode formed from the first structural material and a second electrode formed from the second structural material, where the testing method comprises a first step for applying a first voltage to the hold capacitor; a second step for applying a second voltage to the hold capacitor after the first step; a third step for measuring the charge in the pixel after applying the second voltage; and a fourth step for calculating the capacitance of the hold capacitor from the charge and the potential difference between the first voltage and the second voltage.
申请公布号 US7029934(B2) 申请公布日期 2006.04.18
申请号 US20050176707 申请日期 2005.07.07
申请人 AGILENT TECHNOLOGIES, INC. 发明人 CHIKAMATSU KIYOSHI;TAJIMA KAYOKO
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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