Apparatus for measuring film thickness formed on object, apparatus and method of measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object,申请号KR20030060054-传众专利搜索

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发明名称	Apparatus for measuring film thickness formed on object, apparatus and method of measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object
摘要
申请公布号	KR100571863(B1)	申请公布日期	2006.04.17
申请号	KR20030060054	申请日期	2003.08.29
申请人		发明人
分类号	G01B11/06;G01B11/16;G01N21/21;G01N21/27;G01N21/45;G01N21/88;G01N21/95;G01N21/956;H01L21/66	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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