发明名称 |
TECHNIQUE FOR THE FABRICATION OF AN IRON OXIDE PHOTOMASK |
摘要 |
1340604 Iron oxide WESTERN ELECTRIC CO Inc 19 April 1971 [17 April 1970] 26732/71 Heading C1A [Also in Division G2] Iron oxide having a botryoidal morphology is vapour deposited on a substrate heated at 100 -160‹ C. from an iron compound (especially iron pentacarbonyl) which has been thermally decomposed in an oxidizing or inert medium. |
申请公布号 |
ZA7102438(B) |
申请公布日期 |
1972.02.23 |
申请号 |
ZA19710002438 |
申请日期 |
1971.04.16 |
申请人 |
WESTERN ELECTRIC CO INC |
发明人 |
SULLIVAN M;MAC CHESNEY J;O CONNOR P |
分类号 |
C23C16/40;G03F1/54;G03F1/76 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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