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发明名称
SUBSTRATE TRANSFER DEVICE AND METHOD OF USING THE SAME
摘要
申请公布号
KR20060031938(A)
申请公布日期
2006.04.14
申请号
KR20040080921
申请日期
2004.10.11
申请人
SAMSUNG SDI CO., LTD.
发明人
KIM, JIN PIL;LEE, KANG IL;JEONG, SEONG HO;KIM, YOUNG KAG
分类号
H01J9/46;H01J11/10
主分类号
H01J9/46
代理机构
代理人
主权项
地址
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