| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing samples, which easily produce a thin film sample favorably appropriate for observation. SOLUTION: An ion gun is repeatedly sloped from side to side, whereby a sample material 11 is etched by ion beams I<SB>B</SB>being respectively sloped at 1.5 degrees from side to side relatively to the z-axis. After a situation shown in figure (a), the sample material 11 is etched as shown in figure (b). Then, the ion gun is sloped from side to side several times to etch the sample material 11 by ions, and the sample material 11 is etched as shown in figure (c). A portion (A) of the sample material 11 shown in figure (c) is further etched by ions, whereby a through hole H is formed in the sample material 11 as shown in figure (d). A region K surrounding the through hole H becomes membraneous with a thickness of about 100Å. The thickness of the thin film region K is appropriate for TEM observations. COPYRIGHT: (C)2006,JPO&NCIPI
|
