| 摘要 |
PROBLEM TO BE SOLVED: To cope with enlargement of a liquid crystal panel or the like without enlarging an inspection device. SOLUTION: This probe unit 21 is equipped with a probe base 23 fixed to the body side, a probe block 24 for supporting a probe needle 80 on an accurate position in the mounted state on the probe base 23, and a lateral direction position adjusting mechanism 34 for positioning the probe needle 80 by adjusting the position of the probe block 24. The lateral direction position adjusting mechanism 34 is constituted by being equipped with an eccentric pin 61 for adjusting the position of the probe block 24 to the probe base 23 by deviation of a head part 61B by being rotated. The probe unit is equipped with a lateral slide mechanism 31 having a lateral rail 36 having a trapezoid-shaped section mounted on the probe base 23; a rail groove 37 mounted on a suspension base 26 of the probe block 24, into which the lateral rail 36 is interfitted; and a plunger 38 mounted on one side of the rail groove 37, to be pressure-contacted onto the tilt surface of the lateral rail 36. COPYRIGHT: (C)2006,JPO&NCIPI
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