| 发明名称 |
NEW AMINO-DISILANE AND METHOD FOR FORMING SILICON CARBONITRIDE FILM |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel amino-disilane suitable, for example, for forming a silicon carbonitride film by a heat CVD method. SOLUTION: The new amino-disilane is represented by the general formula: (CH<SB>3</SB>)<SB>3</SB>Si<SB>2</SB>(NR<SP>1</SP>R<SP>2</SP>)<SB>3</SB>(wherein R<SP>1</SP>is hydrogen or a methyl group; and R<SP>2</SP>is a 1-6C alkyl group). COPYRIGHT: (C)2006,JPO&NCIPI
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| 申请公布号 |
JP2006096675(A) |
申请公布日期 |
2006.04.13 |
| 申请号 |
JP20040281457 |
申请日期 |
2004.09.28 |
| 申请人 |
L'AIR LIQUIDE SA POUR L'ETUDE & L'EXPLOITATION DES PROCEDE S GEORGES CLAUDE |
发明人 |
TSUKADA ERI;DUSSARAT CHRISTIAN |
| 分类号 |
C07F7/10;C23C16/42;H01L21/312;H01L21/318 |
主分类号 |
C07F7/10 |
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