| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate drier capable of efficiently drying substrates with consumption of a little quantity of air and capable preventing the generation of mist when drying to surely prevent adhesion of the mist to dried substrates. SOLUTION: Substrates S are conveyed by a conveyor means 10, and transferred from a washing stage 1 to a drying stage 2, and led into a drying unit 20. In a heating passage 23, liquid adhered to the substrates S is heated by an upper and a lower plate heaters 25 and 25. In a drying air flow passage 24, drying air is blown to the substrate S in a direction crossing the substrate S conveying direction. COPYRIGHT: (C)2006,JPO&NCIPI
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