| 摘要 |
PROBLEM TO BE SOLVED: To supply a method and a device to protect the interferometric modulator from electrostatic discharge. SOLUTION: An MEMS device like an interferometric modulator contains an integrated ESD protective element that can shunt the overcurrent transferred by an electric conductor in the MEMS device to the ground. The protective element can be a diode and formed by depositing a plural number of doped semiconductor layers on a base plate where the MEMS device is formed. COPYRIGHT: (C)2006,JPO&NCIPI
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