| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter discharge path which facilitates the work of assembling or removing the partition wall. SOLUTION: In the foreign matter discharge path 20, a plurality of the first and second rectification walls 43 and 44 and guide walls 53 are built inside the body 30 of the discharge path comprising the bottom part 36 of the body and a side wall 32 erected on the bottom part 36 of the body. A plurality of ball paths 56 in each of which a bridge path 37 is positioned each between the first and second rectification walls 43 and 44 adjacent to each other and between the guide walls 53 adjacent to each other while clearances are formed respectively between the bridge path 37 and the first and second rectification walls 43 and 44 and between it and the guide walls 53 is arranged side by side inside the body 30 of the discharge path. The foreign matter discharge path 20 is provided with the first-third lid members 41 and 51 covering the upper part of the body 30 of the discharge path. The first and second rectification walls 43 and 44 are formed integrally on the undersurface of the second lid member 41 and the guide walls 53 formed integrally on the undersurface of the third lid member 51. COPYRIGHT: (C)2006,JPO&NCIPI
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