METHOD AND SYSTEM FOR INJECTING CHEMISTRY INTO A SUPERCRITICAL FLUID
摘要
<p>A method and system (100) is described for introducing chemistry into a high pressure fluid for treating a substrate. In particular, the method includes dispersing the chemistry throughout the volume of high pressure fluid in order to promote mixing of the two or more fluids, while the high pressure fluid is circulating through a high pressure processing system (110).</p>
申请公布号
WO2006039321(A1)
申请公布日期
2006.04.13
申请号
WO2005US34761
申请日期
2005.09.27
申请人
TOKYO ELECTRON LIMITED;TOKYO ELECTRON AMERICA, INC.;BABIC, DARKO;WHITE, CARL, L.;PARENT, WAYNE, M.
