| 摘要 |
PROBLEM TO BE SOLVED: To reduce stray light when a replica diffraction grating is used for a spectroscope unit by suppressing surface roughness of the grating plane of the replica diffraction grating. SOLUTION: A master diffraction grating 10 has a grating surface on which an Al thin film 23 is formed by vacuum deposition via a mold releasing agent film 13. As a replica substrate 21, a substrate is employed whose surface on the side where the grating surface is formed, namely, an adhesion surface 21a is a glossy surface. Adhesive bond 22 of thermosetting epoxy resin mixed with a silane coupling agent is applied onto the surface 21a, and the Al thin film 23 of the master diffraction grating 10 is stuck thereon. When both of the replica substrate and the master diffraction grating are exfoliated bordering on the mold releasing agent film 13 after the adhesive bond 22 is cured, the Al thin film 23 is reverse transfered on the replica substrate 21, and the replica diffraction grating 20 is completed. Since the surface roughness of the adhesion surface 21a is small, the surface roughness of the grating surface of the replica diffraction grating 20 is suppressed to the same degree as the surface roughness of the master diffraction grating 10, and adhesiveness is also successful since the coupling agent is mixed in the adhesive bond. COPYRIGHT: (C)2006,JPO&NCIPI
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