| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of preventing displacement of a contact terminal by thermal expansion of an elastic layer formed with the contact terminals thereon. SOLUTION: In a contact terminal unit 20 constituting this probe card X, a block-like elastic member 22 (the elastic layer) comprising rubber or the like is held on a holding base material 21 of a substrate comprising a low thermal expansion material such as silicon, the plurality of contact terminals 2 is arrayedly formed on the elastic member 22 to be bonded film-likely on a surface of the holding base material 21 (one example of the low thermal expansion material) of the low thermal expansion material, in a periphery along an arrayed face direction of the plurality of contact terminals 2 in the elastic member 22, an elastic member restraint layer 23 having integral structure integrated with the holding base material 21 is formed thereby, and the periphery of the elastic member 22 is restricted by the elastic member restraint layer 23. COPYRIGHT: (C)2006,JPO&NCIPI
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