| 摘要 |
PROBLEM TO BE SOLVED: To provide a correct and convenient method of an interference modulator with respect to a micro electricity mechanical system (MEMS). SOLUTION: A time-variation voltage waveform is applied to the interference modulator in a block 150, the reflectivity of light from the interference modulator is detected in a block 152, the reflectivity is determined as a function of electric voltage in a block 160, and sufficient quality for use as a display is recognized in a block 162. When there are a plurality of interference modulators, it is determined whether the repetition is required in a block 164, and the block 152 and after are repeated, thereby recognizing the quality of the plurality of interference modulators. COPYRIGHT: (C)2006,JPO&NCIPI
|
