发明名称 SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a substrate with a satisfactory manufacture yield and suitable for use as a substrate for microscopic observation. SOLUTION: A glass plate of high surface flatness is employed in stead of natural mica so far used as a base material. A break groove is formed in advance in one surface of the glass plate of an S grade, and thereafter, a gold thin film is formed by vapor deposition on the reverse surface. A substrate for specimen observation of a scanning probe microscope or a substrate, of 10 mm square for example, suitable for a reflector for reflectance spectrum analysis, is cut out by only applying a small amount of force to the break groove by means of a pair of tweezers, etc. The substrate thus obtained is resistant to exfoliation, etc. of the gold thin film, easy to handle, excellent in durability and corrosion resistance, and free from slowly releasing humidity like mica. This substrate is used for forming a suitable specimen observation substrate, etc. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006098211(A) 申请公布日期 2006.04.13
申请号 JP20040284611 申请日期 2004.09.29
申请人 SHIMADZU CORP 发明人 OIKAWA YUKIO;NISHIMOTO HISAHIRO
分类号 G01N21/27;G01Q30/08;G01Q30/20;G02B5/08 主分类号 G01N21/27
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