摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of checking a conveyance state of an article being an object to be inspected in a chassis, and of rapidly sensing an abnormal conveyance state of the article. SOLUTION: In the X-ray inspection device 10, a control computer 20 previously measures a basic physical quantity of the article being the object to be inspected before starting its inspection, based on picture data received from a phototube 17. The control computer 20 measures a physical quantity corresponding to the basic physical quantity about the article which is conveyed into a shield box, based on an X-ray image generated by using a value of transmitted X rays sensed by an X-ray line sensor 14. Then, the control computer 20 compares the measured physical quantity with the basic physical quantity and makes the judgement that the abnormal conveyance state occurs therein in the case a result of above comparison is not in a prescribed error range. COPYRIGHT: (C)2006,JPO&NCIPI
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