| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS device manufactured by a single multilayer wafer, lessening the problem of alignment related to design of two parts in the prior art. SOLUTION: According to one embodiment, the MEMS device has a stationary part and a movable part rotatably coupled to the stationary part. The stationary part includes an electrode and a first conducting structure electrically separated from the electrode. The movable part includes a rotatable flat plate and a second conducting structure provided on the flat plate and electrically connected to the flat plate. The mass and position of the second conducting structure are selected to compensate for imbalance of the flat plate to the axis of rotation. Further, in the resting position, the first and second conducting structures form a substantially continuous barrier constructed to fit an electric shielding to the electrode round the electrode. The movable part is constructed to rotate to the stationary part according to the voltage applied between the second conducting structure and the electrode so that the movable part may not physically come into contact with the electrode during rotation, thereby lessening the problem of snap down peculiar to most of the conventional devices. COPYRIGHT: (C)2006,JPO&NCIPI
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